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Please use this identifier to cite or link to this item: https://hdl.handle.net/11681/33627
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dc.contributor.authorWu, Qihua-
dc.contributor.authorKremer, Kathryn-
dc.contributor.authorGibbons, Stephen-
dc.date.accessioned2019-08-01T14:41:30Z-
dc.date.available2019-08-01T14:41:30Z-
dc.date.issued2019-07-
dc.identifier.govdocERDC/EL CR-19-1-
dc.identifier.urihttps://hdl.handle.net/11681/33627-
dc.identifier.urihttp://dx.doi.org/10.21079/11681/33627-
dc.descriptionContract Report-
dc.description.abstractOptical measurement techniques have been widely used for the determination of thin film thicknesses and optical constants. This standard operating procedure (SOP) presents a specific protocol for the determination of nanomaterial thin-film thicknesses and their optical constants — including the refractive index (RI) and the extinction coefficient — using a Filmetrics F40-UV Thin Film Analyzer. Procedures and recommendations of instrument preparation and parameters, sample measurement, and results analysis are included. The procedure applies to a wide range of nanomaterial thin films in the thickness range from approximately 4 nm to 25 μm.en_US
dc.description.sponsorshipEnvironmental Consequences of Nanotechnologies Program (U.S.)en_US
dc.description.tableofcontentsAbstract ................................................................................................................................................... ii Figures .................................................................................................................................................... iv Preface ..................................................................................................................................................... v Acronyms ................................................................................................................................................ vi Unit Conversion Factors ....................................................................................................................... vii 1 Introduction ..................................................................................................................................... 1 Background .............................................................................................................................. 1 Objective ................................................................................................................................... 1 Approach ................................................................................................................................... 1 2 Terminology ..................................................................................................................................... 3 2.1 Related Documents ....................................................................................................... 3 2.2 Definitions ...................................................................................................................... 3 3 Materials and Apparatus ............................................................................................................... 4 3.1 Materials ........................................................................................................................ 4 3.2 Apparatus ....................................................................................................................... 4 4 Procedure ........................................................................................................................................ 5 4.1 Experiment Preparation ................................................................................................ 5 4.1.1 Sample preparation ....................................................................................................... 5 4.1.2 Instrument Start-up ........................................................................................................ 5 4.2 Sample Measurement ................................................................................................... 5 4.2.1 Select Film Recipe .......................................................................................................... 5 4.2.2 Edit the Film Recipe ....................................................................................................... 6 4.2.3 Baseline Measurement .................................................................................................. 7 4.2.4 Sample Measurement ................................................................................................... 7 4.2.5 Shut-Down ...................................................................................................................... 7 5 Reporting ......................................................................................................................................... 8 5.1 Analysis of Results ......................................................................................................... 8 5.2 QA/QC Considerations................................................................................................... 8 References .............................................................................................................................................. 9 Report Documentation Page-
dc.format.extent19 pages / 1.243 Mb-
dc.format.mediumPDF-
dc.language.isoen_USen_US
dc.publisherEnvironmental Laboratory (U.S.)en_US
dc.publisherEngineer Research and Development Center (U.S.)-
dc.relation.ispartofseriesContract Report (Engineer Research and Development Center (U.S.)) ; no. ERDC/EL CR-19-1-
dc.rightsApproved for Public Release; Distribution is Unlimited-
dc.sourceThis Digital Resource was created in Microsoft Word and Adobe Acrobat-
dc.subjectExtinction coefficienten_US
dc.subjectNanomaterial thin-filmen_US
dc.subjectOptical constanten_US
dc.subjectOptical measurement techniquesen_US
dc.subjectRefractive indexen_US
dc.titleDetermination of nanomaterials’ film thickness using filmetrics F40-UV thin-film analyzer; Standard Operating Procedure Series : Characterization (C)en_US
dc.typeReporten_US
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